沼口 良太, 千葉 明, 松坂 壮太, 比田井 洋史, 森田 昇
日本機械学会関東支部総会講演会講演論文集 2014(20) "21201-1"-"21201-2" 2014年3月14日
Demands of laser scribing to glass increase in electronic device relevant market.Untill now, laser scribing is analyzed by an steady state. However, since a laser scribing phenomenon is a result of movement of being accompanied by propagation of a crack and displacement by thermal expansion of a minute domain, it needs the unsteady thermo elasticity analysis based on an equation of motion. The three-dimensional thermal field model and the two-dimensional stress field model were developed, and they were calculated using numerical computation. Under the condition table feed rate 200mm/s, the laser power 58.7W, it was found that the maximum temperature is 560℃, maximum stress is lOMPa.Distribution of the phase differences observed by the experiment and derived by analysis were similar. Result of analysis is reliable because the phase difference is generated by stress.